Single-Side Polisher
TAP-500/600 Dual series
This series of polishing machines comprises high-precision single-sided polishing equipment with double polishing discs to realize four-spindle simultaneous processing. The machines can be equipped with corresponding polishing heads for different wafers, fix wafers by vacuum adsorption, and pressurize using air bags. The polishing head can rotate and swing. They are suitable for polishing various semiconductor materials.
  • wafer size

    6 inch

  • Plate Specifications

    OD520 mm

  • Amount of polishing plate

    2

  • Amount of polishing head

    4

  • Features
    High Compatibility
    Maxium 8 inch
    Pressurizing Method
    Vacuum adsorption fixed wafer airbag pressurization
    Drive Mode
    2 polishing plate and 4 polishing head work at sametime
    Cleaning Function
    Immersion ultrasonic cleaning tank, polishing head self-cleaning function