With the function of cleaning and drying, operated by a manipulator in a closed environment, low risk, prevention of secondary pollution.
PLC touch screen control, manipulator automatically completes the automatic wafer cleaning process from cassette to cassette.
Compatible with 2, 4 and 6 inch wafer
Minimize the floor space in the clean room.
Item | TWB-200 |
Wafer size | 2、4、6 inch |
Fully automatic loading and unloading system | Available |
Loading table | 2 |
Unoading table | 2 |
Cleaning station | 2 |
Wafer fixing | Vacuum absorption |
Brushing | PVA brush, moving up & down, left & right |
Drying | High speed spinning |
Control system | PLC touch screen |