With the function of cleaning and drying, operated by a manipulator in a closed environment, low risk, prevention of secondary pollution.
PLC touch screen control, manipulator automatically completes the automatic wafer cleaning process from cassette to cassette.
Compatible with 2, 4 and 6 inch wafer
Minimize the floor space in the clean room.
|Wafer size||2、4、6 inch|
|Fully automatic loading and unloading system||Available|
|Wafer fixing||Vacuum absorption|
|Brushing||PVA brush, moving up & down, left & right|
|Drying||High speed spinning|
|Control system||PLC touch screen|