Semiautomatic single-axis grinding machine is a high-precision grinding machine with simple operation, abundant function and high cost performance, is equipped with automatic thickness measurement and compensation system in manual loading, can grind wafers to the required value automatically. The operating table can be customized according to customer requirements and has a wide range of applications.
Automatic thickness measurement and compensation, multistage grinding program, waiting under overloading and other function, meeting various process requirements.
PC industrial computer system, touch screen control, one- button automatic grinding process in addition to manual loading and unloading.
Operating table can be customized according to customer’s needs, can meet grinding and thinning process requirements of various semiconductor materials.
Minimize the floor space of clean room
| Item | IVG-2020 | IVG-3020 |
| Wafer size | Max 8 inch | Max 12 inch |
| Grinding wheel size | Ø203(OD)mm | Ø303(OD)mm |
| Grinding wheel rotation | 0~6000 RPM | 0~4000 RPM |
| Operating table rotation | 0~400 RPM | 0~260 RPM |
| Z-axis Stroke | 130mm | 130mm |
| Z-axis Feed Speed | 0.1~1000 um /sec Option: minimum0.01um/sec |
0.1~1000 um /sec Option: minimum0.01um/sec |
| On Line Thickness measurement resolution | 0.1um | 0.1um |
| On Line Thickness measurement repeatability | ±0.001 mm | ±0.001 mm |
| SECE/GEM, MES system | Optional | Optional |
86-10-6477 8430
Add：Building 6, No. 3, Duyang North Street, Shunyi District, Beijing 101300
Email：sales@tsd-semicon.com
Fax：86-10-6477 8420
