With abundant MEMS process experience and advanced machine process technology, TSD can provide CMP, post-CMP cleaning, grinding, polishing machines and process solutions for various MEMS wafers.
MEMS accelerometer
MEMS microphone
MEMS optical sensor
MEMS pressure Sensor
MEMS gyroscope
MEMS humidity sensor
86-10-6477 8430
Add：Building 6, No. 3, Duyang North Street, Shunyi District, Beijing 101300
Email：sales@tsd-semicon.com
Fax：86-10-6477 8420
